Pilot plant test in the ambit of LIFE BITMAPS
A large amount of wastewater containing tetramethylammonium hydroxide (TMAH) is generated every year in Europe by the electronics and semiconductor (E&S) industries. Because of the toxic properties of the TMAH, the current limit of 7 mg/L is not considered to be adequate for protecting the water ecosystem. Therefore, the industrial streams containing TMAH have to be further treated before discharge into the drainage system with high costs for the companies and high impacts on the environment.
The ultimate goal of BITMAPS project is to demonstrate technical performance and economic viability of an innovative pilot process for the simultaneous treatment of spent photoresist/TMAH (PR/TMAH) developer solution that shall enable Lfoundry to reduce the output concentration at discharge (in drainage) by a factor around 20: from 7 mg/L to 0,4 mg/L
This job comes from a partnership with Science Magazine and